In addition to lithographic techniques like photolithography and electron beam lithography used commonly in producing nanotechnology related devices, a rapidly emerging technique is soft lithography.

EUV is the clear winner down to 5nm, but what comes after that may be a combination of tools and techniques. Chipmakers are ramping up extreme ultraviolet (EUV) lithography for advanced logic at 7nm ...

John Warlaumont, vice president of advanced technologies at SEMATECH, a consortium of the world's chip manufacturers, talks to Nadya Anscombe about the future of optical lithography. Most companies in ...