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DG-MOS process flow. a) Epi stack: SiGe SEG + Si NSEG b) Definition of ...
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(PDF) Dislocation dynamics in SiG…
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Figure 1 from Method of improving dislocation for SiGe EPI process ...
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Figure 1 from Method of improving dislocation for SiGe EPI process ...
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Cross section of Pseudomorphic SiGe p-…

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