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Amorphous
Ga2O3 Tem
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(a) Dislocation density in α-Ga2O3 epilayers a…
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TEM image of Ga2O3 films deposited A with and B without O2 flow. C XR…
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(a) TEM image of a single β-Ga2O3 nanotube (NT) oxi…
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Cross-sectional HR-S/TEM images of a PEALD Ga2O3 film deposited at …
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